ERS electronic introduces ProbeSense(TM), a state-of-the-art measurement device for automated temperature calibration in wafer test
PR96163
MUNICH, May 24, 2022 /PRNewswire=KYODO JBN/--
ERS electronic [https://www.ers-gmbh.com/], the industry leader in the
market of thermal management solutions for semiconductor manufacturing, has
developed a temperature calibration device that allows automatic and highly
accurate measurements below 30mK in the actual probing area.
The patent-pending device, aptly named ProbeSense(TM)
[https://www.ers-gmbh.com/thermal-chucks/probesense], consists of a temperature
sensor, which is mounted in the probe card position on the prober. Taking
advantage of the XYZ axis motion capability of the prober, the sensor can
measure the temperature over several points on the wafer surface in the same
conditions as during wafer probing. ProbeSense(TM) is delivered with adapter
plates to fit your prober of choice and is thereby compatible with all wafer
probers in the semiconductor industry. Included in the ProbeSense(TM) package
is also a temperature measurement instrument, which has been calibrated
together with the sensor in the mK range.
By integrating ERS's ProbeSense(TM) software in the prober, the process can
be fully automated, allowing a test script to be run for multiple points and at
multiple temperatures on the chuck without the need for an operator. MPI
Corporation [https://www.mpi-corporation.com/] is the first prober manufacturer
offering this add-on function in its probing stations.
"ProbeSense(TM) addresses the need for a robust, highly accurate, and
easy-to-use calibration tool," says Klemens Reitinger, CTO of ERS electronic.
"We believe that the automation capability, which is in the process of being
integrated by several prober manufacturers, will be a game-changer when it
comes to accuracy calibration and temperature uniformity measurement."
"MPI Corporation sees a clear benefit of integrating ProbeSense(TM) for
thermal chuck calibration into SENTIO(R) Prober control Software Suite. The
fully automated procedure provides intuitive operation and fast results by
utilizing the night or the weekend for calibration, thereby eliminating the
need to sacrifice valuable test time", says Stojan Kanev, General Manager of
Advanced Semiconductor Test at MPI Corporation. "By offering this capability to
our customers, we are addressing their demand for a cost- and time-efficient
thermal calibration solution."
ERS's ProbeSense(TM) is available to order now.
About ERS:
ERS electronic GmbH, based around Munich, has been producing innovative
thermal test solutions for the industry for more than 50 years. The company has
gained an outstanding reputation in the sector, notably with its fast and
accurate air cool-based thermal chuck systems for test temperatures ranging
from -65°C to +550°C for analytical, parameter-related, and manufacturing tests.
Video: https://www.youtube.com/watch?v=YuJksH8uOQY
Logo: https://mma.prnewswire.com/media/1801970/ERS_electronic_GmbH_Logo.jpg
Source - 'ERS electronic GmbH'
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