PR94113

ST. FLORIAN, Austria, Jan. 18, 2022 /PRNewswire=KYODO JBN/ --

-- EVG(R)7300 is the most advanced EVG solution to combine multiple UV-based

processes, such as nanoimprint lithography (NIL), lens molding and lens

stacking (UV bonding), in a single platform

EV Group (EVG), a leading supplier of wafer bonding and lithography equipment

for the MEMS, nanotechnology and semiconductor markets, today introduced the

EVG(R)7300 automated SmartNIL(R) nanoimprint and wafer-level optics system. The

EVG7300 is the company's most advanced solution to combine multiple UV-based

process capabilities, such as nanoimprint lithography (NIL), lens molding and

lens stacking (UV bonding), in a single platform. This industry-ready,

multi-functional system is designed to serve advanced R&D and production needs

for a wide range of emerging applications involving micro- and nano-patterning

as well as functional layer stacking. These include wafer-level optics (WLO),

optical sensors and projectors, automotive lighting, waveguides for augmented

reality headsets, bio-medical devices, meta-lenses and meta-surfaces, and

optoelectronics. Supporting wafer sizes up to 300 mm and featuring

high-precision alignment, advanced process control and high throughput, the

EVG7300 meets the high-volume manufacturing needs for a variety of freeform and

high-precision nano- and micro-optical components and devices.

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https://mma.prnewswire.com/media/1728257/EVG_7300_SmartNIL_Nanoimprint.jpg

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https://mma.prnewswire.com/media/1728258/EVG_SmartNIL_Structured_AR_Waveguides.jpg

Logo - https://mma.prnewswire.com/media/1278751/EV_Group_Logo.jpg

"With more than 20 years of experience in nanoimprint technology, EV Group

continues to pioneer this critical field to develop innovative solutions to

meet our customers' evolving needs," stated Thomas Glinsner, corporate

technology director at EV Group. "The latest introduction to our family of

nanoimprint solutions, the EVG7300, combines our SmartNIL full-field imprint

technology with lens molding and lens stacking in a state-of-the-art system

with the most precise alignment and process parameter control on the

market—providing our customers with unprecedented flexibility for their

industry research and production needs."

The EVG7300 system is offered as both a stand-alone tool as well as an

integrated module in EVG's HERCULES(R) NIL fully integrated UV-NIL track

solution where additional pre-processing steps, such as cleaning, resist

coating and baking or post-processing, can be added to optimize for particular

process needs. The system features industry-leading alignment accuracy (down to

300 nm), which is enabled by a combination of alignment stage improvements,

high-accuracy optics, multi-point gap control, non-contact gap measurement and

multi-point force control. The EVG7300 is a highly flexible platform that

offers three different process modes (lens molding, lens stacking and SmartNIL

nanoimprint) and support for substrate sizes ranging from 150-mm to 300-mm

wafers. Quick loading of stamps and wafers, fast alignment optics, high-power

curing and a small tool footprint enable a highly efficient platform capable of

serving the industry's manufacturing needs for emerging WLO products.

Product Availability

EVG is currently accepting orders for the system, and product demonstrations

are now available at EVG's NILPhotonics(R) Competence Center located at the

company's headquarters. For more information on the EVG7300 automated SmartNIL

nanoimprint and wafer-level optics system, visit

https://www.evgroup.com/products/nanoimprint-lithography/uv-nil-smartnil/evg-7300/.

EVG at SPIE AR/VR/MR 2022

Next week, EVG is giving an invited talk on the benefits of NIL in

manufacturing augmented reality waveguides at the SPIE AR/VR/MR Conference and

Exhibition, co-located with SPIE Photonics West, which is being held at the

Moscone Center in San Francisco on January 22-27. EVG is also an exhibitor at

the event, and will showcase its advanced manufacturing solutions for optical

and photonic devices and applications.

About EV Group (EVG)

EV Group (EVG) is a leading supplier of equipment and process solutions for the

manufacture of semiconductors, microelectromechanical systems (MEMS), compound

semiconductors, power devices and nanotechnology devices. Key products include

wafer bonding, thin-wafer processing, lithography/nanoimprint lithography (NIL)

and metrology equipment, as well as photoresist coaters, cleaners and

inspection systems. Founded in 1980, EV Group services and supports an

elaborate network of global customers and partners all over the world. More

information about EVG is available at www.EVGroup.com.

Contacts:

Clemens

Schütte                                                                    

Director, Marketing and Communications

EV Group

Tel: +43 7712 5311 0    

E-mail: Marketing@EVGroup.com

David Moreno                            

Principal                                                                      

Open Sky Communications

Tel: +1.415.519.3915

E-mail: dmoreno@openskypr.com

SmartNIL(R) structured augmented reality (AR) waveguides and

wafer-level-microlenses imprint showcasing the application versatility of the

new EVG(R)7300.

SOURCE: EV Group