PR97605

ST. FLORIAN, Austria, Aug. 31, 2022 /PRNewswire=KYODO JBN/ --

EV Group (EVG), a leading supplier of wafer bonding and lithography equipment

for the MEMS, nanotechnology and semiconductor markets, today announced that it

has expanded its collaboration with the Industrial Technology Research

Institute (ITRI), one of the world's leading applied technology research

institutes based in Hsinchu, Taiwan, on developing advanced heterogeneous

integration processes.

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With the support of the Department of Industrial Technology (DoIT) of the

Ministry of Economic Affairs (MOEA), Taiwan, ITRI established the Heterogeneous

Integration Chip-let System Package Alliance (Hi-CHIP) to help create an

ecosystem covering package design, testing and verification, and pilot

production, to achieve the goal of supply chain localization and expand

business opportunities. As a member of the Hi-CHIP Alliance, EVG has provided

several of its most advanced wafer bonding and lithography systems, including

the LITHOSCALE(R) maskless exposure lithography system, EVG(R)850 DB automated

debonding system, and GEMINI(R)FB hybrid bonding system. The installation of

these high-volume-manufacturing platforms at ITRI's state-of-the-art facility

will help enable EVG's and ITRI's shared customers to accelerate the

development and transfer of new heterogeneous integration processes from R&D to

customers' fabs.

In semiconductor manufacturing, 3D vertical stacking and heterogeneous

integration – the manufacturing, assembly and packaging of multiple different

components and dies into a single device or package – are increasingly

important for higher performance beyond transistor scaling. 3D and

heterogeneous integration are enabling high-bandwidth interconnects in advanced

packaging to achieve overall system performance gains, and thus have become a

crucial driver for artificial intelligence (AI), autonomous driving and other

high-performance computing applications. As a result, the MOEA is proactively

following up and bridging the resources with national-scale R&D projects such

as "AI Chip Heterogeneous Integrated Module Advanced Manufacturing Platform"

and "Programmable Heterogeneous 3D Integration".

According to Dr. Robert (Wei-Chung) Lo, Deputy General Director of Electronic

and Optoelectronic System Research Laboratories at ITRI, "As part of ITRI's

mission to drive industrial development, create economic value, and enhance

social well-being through technology R&D, we focused on developing new 3D and

heterogeneous chip integration processes and forging close cooperation across

the supply chain to enable continued development and growth of the

semiconductor industry. Having the same fully automated

high-volume-manufacturing systems in our research facility that our customers

have in their fabs, including these new wafer bonding and lithography solutions

from EV Group, enables our customers to immediately transfer process recipes

developed at ITRI to their own fabs – providing short ramp-up time from lab to

fab."

"Key to our Triple-i philosophy of invent-innovate-implement is our focus on

engaging with world-leading research institutes, like ITRI, to accelerate the

development and commercialization of new technologies that drive future

innovations in the semiconductor industry," stated Hermann Waltl, executive

sales and customer support director and member of the executive board at EV

Group. "Our ongoing collaboration with ITRI gives us access to world-class

research expertise and further enhances our process support infrastructure in

Taiwan, which EVG has significantly expanded over the years to better meet the

growing needs and challenges that our customers and partners in the region

face. This includes our exceptional process and application engineering team

based in multiple locations across Taiwan, which complements the services

provided at EVG's Heterogeneous Integration Competence Center at our

headquarters in Austria."

About ITRI

Industrial Technology Research Institute (ITRI) is one of the world's leading

technology R&D institutions aiming to innovate a better future for society.

Founded in 1973, ITRI has played a vital role in transforming Taiwan's

industries from labor-intensive into innovation-driven. To address market needs

and global trends, it has launched its 2030 Technology Strategy & Roadmap and

focuses on innovation development in Smart Living, Quality Health, and

Sustainable Environment. It also strives to strengthen Intelligentization

Enabling Technology to support diversified applications.

Over the years, ITRI has been dedicated to incubating startups and spinoffs,

including well-known names such as UMC and TSMC. In addition to its

headquarters in Taiwan, ITRI has branch offices in the U.S., Europe, and Japan

in an effort to extend its R&D scope and promote international cooperation

across the globe. For more information, please visit

https://www.itri.org.tw/english/.

About EV Group (EVG)

EV Group (EVG) is a leading supplier of equipment and process solutions for the

manufacture of semiconductors, microelectromechanical systems (MEMS), compound

semiconductors, power devices and nanotechnology devices. Key products include

wafer bonding, thin-wafer processing, lithography/nanoimprint lithography (NIL)

and metrology equipment, as well as photoresist coaters, cleaners and

inspection systems. Founded in 1980, EV Group services and supports an

elaborate network of global customers and partners all over the world. More

information about EVG is available at www.EVGroup.com.

Contacts:

Clemens Schutte                            

Director, Marketing and Communications      

EV Group                                    

Tel: +43 7712 5311 0                        

E-mail: Marketing@EVGroup.com               

David Moreno

Principal

Open Sky Communications

Tel: +1.415.519.3915

E-mail: dmoreno@openskypr.com

SOURCE EV Group