PR95303

TOKYO, Apr. 4, 2022 /PRNewswire=KYODO JBN/--

Atonarp (

https://c212.net/c/link/?t=0&l=en&o=3491594-1&h=1345529459&u=http%3A%2F%2Fwww.atonarp.com%2F&a=Atonarp

), the leader in in-situ, real-time high-sensitivity metrology for

semiconductor process control, announces worldwide release for sale of its

Aston (

https://c212.net/c/link/?t=0&l=en&o=3491594-1&h=3349037828&u=https%3A%2F%2Fwww.atonarp.com%2Fproducts%2Faston-semiconductor&a=Aston

) platform. This marks an important milestone in the Company's transition to a

commercial organization on a worldwide scale.

Photo - https://mma.prnewswire.com/media/1778470/Atonarp_Aston_Impact.jpg

Logo  - https://mma.prnewswire.com/media/1573283/Atonarp_Logo.jpg  

Aston is a compact mass spectrometer that provides accurate, real-time data on

the process chemistry with sensitivity to measure the molecular concentrations

down-to parts per billion. This data enables semiconductor manufacturing FABs

to run more efficiently, thus increasing the yield and throughput, delivering

dramatic financial benefits to FAB operators.

With today's announcement, Atonarp is shipping production orders of Aston

Impact to leading semiconductor FABs and equipment manufacturers in Korea and

the USA. It is also shipping dozens of Aston units for clients' evaluations in

their advanced processes to optimize their process and manufacturing

efficiencies.

"The ability to rapidly detect, quantify and provide actionable process control

data at a molecular level is a real game changer in advanced semiconductor

manufacturing processes," said Martin Mason, VP of Product Marketing at

Atonarp. "Even a one percent increase in throughput can add up to tens of

millions of dollars a year in production for a typical FAB. Aston is seeing

significant traction where speed with sensitivity matter to molecular level

process control efficiency."

Metrology is a vital part of semiconductor manufacturing. The concentration of

multiple gases is measured within production equipment to ensure process

margins are met while minimizing waste. Previous solutions have relied on

optical emission spectroscopy and residual gas analyzers, but these legacy

methods cannot provide the speed and sensitivity required for today's advanced

memory and logic processes. Instead, Aston uses innovative mass spectroscopy

technology, with a best-in-class sensor, to provide fast results with excellent

sensitivity, as well as the robustness needed to resist corrosive gases and

condensates.

Aston provides actionable data for advanced semiconductor applications such as

atomic level deposition (ALD) and sub-fab operations. At less than nine parts

per billion square root of Hertz (9ppb square root Hz), Aston offers up to ten

times better sensitivity than competitors' solutions, without compromising on

the speed at which data can be gathered.

Atonarp is actively engaged in partnerships to develop the Aston platform for

new applications within the semiconductor space as well as for applications

where real-time, sensitive gas analysis is needed, such as Oil & Gas and

lyophilization process control.

Aston has achieved multiple certifications and qualifications, EN55032 (EU), EN

55035 (EU), FCC part 15 (US), ICES-003 (Canada), VCCI CISPR-32 (Japan), BSMI

(Taiwan), KC EMC (Korea) for EMI/EMC compliance. With these certifications

Aston is now being shipped in volume to customers worldwide.

Atonarp has partnered with ATI Korea to provide integrated solutions for Etch,

CVD, Spatial ALD and Sub-fab applications to customers in the region.

For more information on the Atonarp Aston family of products please visit:

https://www.atonarp.com.

About Atonarp

Atonarp is advancing clinical diagnostics, life science research,

semiconductor, and industrial process control through digital molecular

profiling. Our Aston and ATON platforms harness the power of innovative

spectrometry technologies with advanced analytics to generate real-time,

actionable results. Our platforms can be applied to a wide variety of

applications across multiple industries. In-situ, highly sensitive molecular

metrology in advanced manufacturing processes means higher throughput, improved

efficiency, and reduced waste. Our quantitative, multiplex chemistry-free

diagnostic tests enable disease diagnosis and monitoring at the point-of-care,

which can improve outcomes and patient satisfaction at lower cost.

SOURCE:  Atonarp

CONTACT: Cynthia Hoye, ch@embedded-pr.com