PR96163

MUNICH, May 24, 2022 /PRNewswire=KYODO JBN/--

    ERS electronic [https://www.ers-gmbh.com/], the industry leader in the

market of thermal management solutions for semiconductor manufacturing, has

developed a temperature calibration device that allows automatic and highly

accurate measurements below 30mK in the actual probing area.

    The patent-pending device, aptly named ProbeSense(TM)

[https://www.ers-gmbh.com/thermal-chucks/probesense], consists of a temperature

sensor, which is mounted in the probe card position on the prober. Taking

advantage of the XYZ axis motion capability of the prober, the sensor can

measure the temperature over several points on the wafer surface in the same

conditions as during wafer probing. ProbeSense(TM) is delivered with adapter

plates to fit your prober of choice and is thereby compatible with all wafer

probers in the semiconductor industry. Included in the ProbeSense(TM) package

is also a temperature measurement instrument, which has been calibrated

together with the sensor in the mK range.

    By integrating ERS's ProbeSense(TM) software in the prober, the process can

be fully automated, allowing a test script to be run for multiple points and at

multiple temperatures on the chuck without the need for an operator. MPI

Corporation [https://www.mpi-corporation.com/] is the first prober manufacturer

offering this add-on function in its probing stations.

    "ProbeSense(TM) addresses the need for a robust, highly accurate, and

easy-to-use calibration tool," says Klemens Reitinger, CTO of ERS electronic.

"We believe that the automation capability, which is in the process of being

integrated by several prober manufacturers, will be a game-changer when it

comes to accuracy calibration and temperature uniformity measurement."

    "MPI Corporation sees a clear benefit of integrating ProbeSense(TM) for

thermal chuck calibration into SENTIO(R) Prober control Software Suite. The

fully automated procedure provides intuitive operation and fast results by

utilizing the night or the weekend for calibration, thereby eliminating the

need to sacrifice valuable test time", says Stojan Kanev, General Manager of

Advanced Semiconductor Test at MPI Corporation. "By offering this capability to

our customers, we are addressing their demand for a cost- and time-efficient

thermal calibration solution."

    ERS's ProbeSense(TM) is available to order now.

    About ERS:

    ERS electronic GmbH, based around Munich, has been producing innovative

thermal test solutions for the industry for more than 50 years. The company has

gained an outstanding reputation in the sector, notably with its fast and

accurate air cool-based thermal chuck systems for test temperatures ranging

from -65°C to +550°C for analytical, parameter-related, and manufacturing tests.

    Video: https://www.youtube.com/watch?v=YuJksH8uOQY

    Logo: https://mma.prnewswire.com/media/1801970/ERS_electronic_GmbH_Logo.jpg

    Source - 'ERS electronic GmbH'