PR98191

BEVERLY, Mass., Oct. 11, 2022 /PRNewswire=KYODO JBN/ --

New Product Line Extension Features Enabling Technology for Image Sensor Market

Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative,

high-productivity solutions for the semiconductor industry, announced today the

successful qualification of a Purion XEmax(TM) high energy ion implant system

for production at a leading CMOS image sensor manufacturer.

President and CEO Mary Puma commented, "We're pleased to have enhanced this

customer's next generation image sensor technology development and

manufacturing capabilities. We are excited that growth in the image sensor

market, combined with Purion XEmax systems at multiple customer sites, will

further expand this tool's footprint and fuel Purion Platform growth."

The Purion XEmax:

The new Purion XEmax high energy implanter was designed for emerging, high

performance image sensor applications. The enhanced beamline features multiple

filtration systems to eliminate energetic metal contaminants which can

otherwise result in compromised dark current and white pixel count levels. The

system is built on the industry leading Purion XE high energy implant platform

and features Axcelis' patented Boost Technology(TM), which delivers beam

energies up to 15 MeV. With innovative technology, the Purion XEmax is

delivering the tightest angle and overall process control to enable higher

quality photodiode performance for next generation devices.

About Axcelis:

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing

innovative, high-productivity solutions for the semiconductor industry for over

40 years. Axcelis is dedicated to developing enabling process applications

through the design, manufacture and complete life cycle support (

https://c212.net/c/link/?t=0&l=en&o=3670915-1&h=2771478117&u=http%3A%2F%2Fwww.axcelis.com%2Fsupport-programs%2Fglobal-support-solutions&a=complete+life+cycle+support

) of ion implantation (

https://c212.net/c/link/?t=0&l=en&o=3670915-1&h=1396724622&u=http%3A%2F%2Fwww.axcelis.com%2Fproducts%2Fion-implant&a=ion+implantation

) systems, one of the most critical and enabling steps in the IC manufacturing

process. Learn more about Axcelis at www.axcelis.com.

CONTACTS:

Maureen Hart (editorial/media) 978.787.4266

Doug Lawson (investor relations) 978.787.9552

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SOURCE: Axcelis Technologies, Inc.