PR95271

BEVERLY, Mass., March 31, 2022 /PRNewswire=KYODO JBN/ --

Purion Power Series Features 300mm Thin Wafer Handling Capability

Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion

implantation solutions for the semiconductor industry, today announced follow

on shipments of the Company's Purion XE(TM) high energy and Purion M(TM) medium

current Power Series(TM) implanters to a leading power device chipmaker located

in Japan. The systems will be used in high volume production of 300mm thin

silicon wafer based MOSFET and IGBT devices for automotive and other power

management applications.

Executive Vice President of Product Development, Bill Bintz, commented, "The

unique capabilities of the Purion Power Series, combined with the

implant-intensive nature of the power device segment, uniquely positions

Axcelis to benefit from growth in this market. These tools incorporate features

and process control capabilities, including the platform's thin wafer handling

capability, that are enabling for the power device market. We look forward to

expanding the Purion platform footprint in Japan and supporting our customers'

goals to increase their manufacturing capacity."

About Axcelis:

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing

innovative, high-productivity solutions for the semiconductor industry for over

40 years. Axcelis is dedicated to developing enabling process applications

through the design, manufacture and complete life cycle support (

https://c212.net/c/link/?t=0&l=en&o=3489522-1&h=475005267&u=http%3A%2F%2Fwww.axcelis.com%2Fsupport-programs%2Fglobal-support-solutions&a=complete+life+cycle+support

) of ion implantation (

https://c212.net/c/link/?t=0&l=en&o=3489522-1&h=3928044728&u=http%3A%2F%2Fwww.axcelis.com%2Fproducts%2Fion-implant&a=ion+implantation

) systems, one of the most critical and enabling steps in the IC manufacturing

process. Learn more about Axcelis at www.axcelis.com .

CONTACTS:

Maureen Hart (editorial/media) 978.787.4266

Doug Lawson (investor relations) 978.787.9552

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SOURCE Axcelis Technologies, Inc.