PR92755

BEVERLY, Mass., Nov. 2, 2021 /PRNewswire=KYODO JBN/ --

     -- New Configuration Designed to Support the Surging 200mm Market

Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of innovative,

high-productivity solutions for the semiconductor industry, announced today the

introduction of the GSD Ovation(TM) high current and high energy batch

implanters. Based on the highly successful GSD Series of implanters, the

industry benchmark for the longest manufactured and supported batch ion

implanter, the new GSD Ovation systems are designed to support the growing

200mm new fab construction and expansion activity.

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President and CEO Mary Puma commented, "Since 2015, 200mm fab construction and

expansion has been surging, resulting in a shortage of new and used 200mm

equipment. This growth in 200mm IC production is unprecedented. Axcelis is

committed to support this significant demand, by providing an evolutionary

batch configuration designed to seamlessly integrate with our installed base as

well as provide new 200mm fabs with the industry's best 200mm batch implant

solution."

Executive Vice President of Product Development, Bill Bintz, added, "The new

GSD Ovation family further strengthens Axcelis' market leadership position, as

the tool of record for 200mm fabs. Innovative improvements, combined with a

proactive continuous improvement roadmap, enables the fastest and most cost

effective way to extend, optimize and sustain robust capability, while

delivering unmatched reliability and lowest cost of ownership. The product line

includes a variety of implanters allowing customers to select the optimal

energy range for their batch implant process, including: the GSD/E2 Ovation for

general high current applications, and for high energy applications, the GSD/HE

Ovation with energies up to 3 MeV, and the GSD/VHE Ovation with energies up to

4.9 MeV."

About Axcelis:

Axcelis (Nasdaq: ACLS), headquartered in Beverly, Mass., has been providing

innovative, high-productivity solutions for the semiconductor industry for over

40 years. Axcelis is dedicated to developing enabling process applications

through the design, manufacture and complete life cycle support of ion

implantation systems, one of the most critical and enabling steps in the IC

manufacturing process. Learn more about Axcelis at www.axcelis.com.  

CONTACTS:

Maureen Hart (editorial/media) 978.787.4266

Doug Lawson (investor relations) 978.787.9552

SOURCE  Axcelis Technologies, Inc.